Radical probe system for in situ measurements of radical densities of hydrogen, oxygen, and nitrogen
Author:
Affiliation:
1. Department of Nuclear, Center for Plasma Material Interactions, Plasma and Radiological Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
Funder
Lam Research
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
https://avs.scitation.org/doi/pdf/10.1116/6.0000786
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