High-gain lateral pnp bipolar transistors made using focused ion beam implantation
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Published:1988-05
Issue:3
Volume:6
Page:1006
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
4 articles.
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1. Focused Ion Beams;Handbook of Charged Particle Optics, Second Edition;2008-10-24
2. Applications of Focused Ion Beams;High Resolution Focused Ion Beams: FIB and its Applications;2003
3. Damage formation and annealing of ion implantation in Si;Materials Science Reports;1991-04
4. Ion Beam Techniques and Applications;VLSI Electronics Microstructure Science;1989