1. C. M. Osburn, M. Y. Tsai , S. Roberts , C. J. Lucchese and C. Y. Ting,VLSI Science and Technology/1982, edited by C. J. Dell'Oca ad W. M. Bullis, in Electrochem. Soc. Proc. 82–7, 213 (1982).
2. B-Y. Tsaur and C. H. Anderson, Jr., Appl. Phys. Lett.47,527 (1985).
3. L. D. Locker and C. D. Capio, J. Appl. Phys.44, 4366 (1973).
4. G. Bomchil, G. Goeltz and J. Torres, Thin Sold Films140,59 (1986).
5. M-A. Nicolet and S. S. Lau,VLSI Microstructure Science,edited by N. G. Einspruch, Vol. 6, Academic Press, New York,458 (1983).