A Novel Ultrasonic Bonding Transducer with Longitudinal and Lateral Operating Modes

Author:

Chen ZitianORCID,Long Zhili,Ju Jianzhong,Ye Shuyuan,Zhao Heng

Publisher

Springer Singapore

Reference9 articles.

1. Lei, Y.Z., Luo, J.B.: Important academic problems in advanced electronic manufacturing. Bull. Nation. Nat. Sci. Found. China 16(4), 204–209 (2002)

2. Sun, L.N., Chen, L.G., Rong, W.B.: Key techniques of micromanipulation devices for mems assembling and packaging. Chinese J. Mech. Eng. 44(11), 13–19 (2008)

3. Deng, D., Wu, F.S., Zhou, L.Z., Liu, H., An, B., Wu, Y.P.: 3D package and its latest research. Microelectr. Dev. Technol. 47(7), 443–450 (2010)

4. Tian, Y.H., Wang, N., Yang, D.S., Wang, C.Q.: Stress analysis and structure optimization of IMC joints in 3D package. Trans. China Weld. Inst. 33(8), 17–20 (2012)

5. Mitsuhashi, T., et al.: Development of 3D-packaging process technology for stacked memory chips. Mater. Res. Soc. Symp. Proc. 970, 155–162 (2006)

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