The Investigation of the Evolution of Cluster Beam Development in the Nozzle-Skimmer System
Author:
Ivanov Igor E.ORCID, Nazarov Vladislav S.ORCID, Kryukov Igor A.ORCID
Publisher
Springer Singapore
Reference38 articles.
1. Khanna, S.N., Linderoth, S.: Magnetic behavior of clusters of ferromagnetic transition metals. Phys. Rev. Lett. 67(6), 742–745 (1991) 2. Yamada, I., Takaoka, H., Usui, H., Takagi, T.: Low temperature epitaxy by ionized-cluster beam. J. Vac. Sci. Technol. A 4, 722–727 (1986) 3. Gruber, A., Gspann, J., Hoffmann, H.: Nanostructures produced by cluster beam lithography. Appl. Phys. 68, 197–201 (1999) 4. Ieshkin, A.E., Kireev, D.S., Ermakov, Yu.A., Trifonov, A.S., Presnov, D.E., Garshev, A.V., Anufriev, Yu.V., Prokhorova, I.G., Krupenin, V.A., Chernysh, V.S.: The quantitative analysis of silicon carbide surface smoothing by Ar and Xe cluster ions. Nucl. Instr. Methods Phys. Res. B 421, 27–31 (2018) 5. Ieshkin, A., Ermakov, Y., Chernysh, V., Ivanov, I.E., Kryukov, I.A., Alekseev, K., Kargin, N., Insepov, Z.: Computer simulation and visualization of supersonic jet for Gas cluster equipment. Nucl. Instrum. Methods Phys. Res., Sect. A 795, 395–398 (2015)
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