Effect of Micro Lever Width on the Mechanical Sensitivity of a MEMS Capacitive Accelerometer-Reference-Cited by-同舟云学术

Effect of Micro Lever Width on the Mechanical Sensitivity of a MEMS Capacitive Accelerometer

Published:2019-12-04 Issue: Volume: Page:525-532
ISSN:1876-1100
Container-title:Lecture Notes in Electrical Engineering
language:
Short-container-title:

Author:

Dwivedi Apoorva,Asthana Prateek,Khanna Gargi

Publisher

Springer Singapore

Link

http://link.springer.com/content/pdf/10.1007/978-981-32-9775-3_47

Reference12 articles.

1. Krishnan, G., Kshirsagar, C.U., Ananthasuresh, G.K., Bhat, N.: Micromachined high-resolution accelerometers. J. Indian Inst. Sci. 87(3), 333–361 (2007)

2. Monajemi, P., Ayazi, F.: Design optimization and implementation of a microgravity capacitive HARPSS accelerometer. IEEE Sens. J. 6(1), 39–46 (2006)

3. Chen, S., Chenyang, X., Wendong, Z., Jijun, X., Binzhen, Z., Jie, H.: A new type of MEMS two axis accelerometer based on silicon. In: Proceedings of 3rd IEEE International Conference NEMS, pp. 959–964, China (2008)

4. Abdolvand, R., Amini, B.V., Ayazi, F.: Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass. J. Microelectromech. Syst. 16(5), 1036–1043 (2007)

5. Dwivedi, A., Khanna, G.: Sensitivity enhancement of a folded beam MEMS capacitive accelerometer-based microphone for fully implantable hearing application. Biomed. Eng./Biomedizinische Technik (2017). https://doi.org/10.1515/bmt-2016-0181

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Variation of Sensitivity of a MEMS Capacitive Accelerometer Based Microphone with Suspension System Topology;Hearing Loss - From Multidisciplinary Teamwork to Public Health;2021-07-07