Publisher
Springer Nature Singapore
Reference8 articles.
1. Strathearn D, Sarkar N, Lee G, Olfat M, Mansour RR (2017) The benefits of miniaturization of an atomic force microscope. In: 30th IEEE international conference on micro electro mechanical systems (MEMS), pp 1363–1366. IEEE, Las Vegas, USA
2. Barrettino D, Hafizovic S, Volden T, Sedivy J, Kirstein K, Hierlemann A, Baltes H (2004) CMOS monolithic atomic force microscope. In: Symposium on VLSI circuits. Digest of technical papers (IEEE Cat. No. 04CH37525), pp 306–309. Widerkehr and Associates, Honolulu, HI, USA
3. Sarkar N, Mansour RR, Patange O, Trainor K (2011) CMOS-MEMS atomic force microscope. In: 16th international solid-state sensors, actuators and microsystems conference, pp 2610–2613. IEEE, Beijing, China
4. Ruppert MG, Fowler AG, Maroufi M, Moheimani SOR (2017) On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach. J Microelectromech Syst 26:215–225. https://doi.org/10.1109/JMEMS.2016.2628890
5. Bell DJ, Lu TJ, Fleck NA, Spearing SM (2005) MEMS actuators and sensors: observations on their performance and selection for purpose. J Micromech Microeng 15:S153–S164. https://doi.org/10.1088/0960-1317/15/7/022