Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Reference44 articles.
1. Bell, J.F., “Experimental Solid Mechanics in the Nineteenth Century,” EXPERIMENTAL MECHANICS,29 (2),157–165 (1989).
2. Sharpe, W.N., Jr., “Mechanical Properties of MEMS Materials,”The MEMS Handbook, CRC Press, Boca Raton, FL, 3-1–3-33 (2001).
3. Chang, D.J. and Sharpe, W.N., Jr., “Mechanical Analysis and Properties of MEMS Materials,” Microengineering for Aerospace Systems, The Aerospace Press of The Aerospace Corporation, 73–118 (1999).
4. Sharpe, W.N., Jr., Yuan, B., Vaidyanathan, R., and Edwards, R.L., “New Test Structures and Techniques for Measurement of Mechanical Properties of MEMS Materials, Proceedings of the SPIE Symposium on Microlithography and Metrology in Micromachining II, Austin, TX, 78–91 (1996).
5. Sharpe, W.N., Jr., Jackson, K., Coles, G., Eby, M.A., and Edwards, R.L., “Tensile Tests of Various Thin Films,” Mechanical Properties of Structural Thin Films, ASTM STP 1413, American Society of Testing and Materials, Orlando, FL, 229–247 (2001).
Cited by
37 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献