Fabrication technique of micro/nano-scale speckle patterns with focused ion beam-Reference-Cited by-同舟云学术

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Fabrication technique of micro/nano-scale speckle patterns with focused ion beam

Published:2012-05-22 Issue:6 Volume:55 Page:1037-1044
ISSN:1674-7348
Container-title:Science China Physics, Mechanics and Astronomy
language:en
Short-container-title:Sci. China Phys. Mech. Astron.

Author:

Li YanJie,Xie HuiMin,Luo Qiang,Gu ChangZhi,Hu ZhenXing,Chen PengWan,Zhang QingMing

Publisher

Springer Science and Business Media LLC

Subject

General Physics and Astronomy

Link

http://link.springer.com/content/pdf/10.1007/s11433-012-4751-4.pdf

Reference33 articles.

1. Sabate N, Vogel D, Gollhardt A, et al. Residual stress measurement on a MEMS structure with high-spatial resolution. J Microelectromech S, 2007, 16(2): 365–372

2. Zhou W, Yang J L, Sun G S, et al. Fracture properties of silicon carbide thin films by bulge test of long rectangular membrane. J Microelectromech S, 2008, 17(2): 453–461

3. Tong C J, Lin M T. Design and development of a novel paddle test structure for the mechanical behavior measurement of thin films application for MEMS. Microsyst Technol, 2009, 15(8): 1207–1216

4. Jonnalagadda K N, Chasiotis I, Yagnamurthy S, et al. Experimental investigation of strain rate dependence of nanocrystalline Pt films. Exp Mech, 2010, 50(1): 25–35

5. Kang D J, Park J H, Shin M S, et al. Specimen alignment in an axial tensile test of thin films using direct imaging and its influence on the mechanical properties of BeCu. J Micromech Microeng, 2010, 20: 085001

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