A Prediction Method of the Removal Function for Inductively Coupled Atmospheric Pressure Plasma Processing Based on Jet Morphology Monitoring and Diagnosis-Reference-Cited by-同舟云学术

A Prediction Method of the Removal Function for Inductively Coupled Atmospheric Pressure Plasma Processing Based on Jet Morphology Monitoring and Diagnosis

Published:2022-04-06 Issue:4 Volume:42 Page:905-922
ISSN:0272-4324
Container-title:Plasma Chemistry and Plasma Processing
language:en
Short-container-title:Plasma Chem Plasma Process

Author:

Tian Hengxi,Zhang Peng,Wu Jie,Xin Qiang,Yu Deping

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry

Link

https://link.springer.com/content/pdf/10.1007/s11090-022-10247-1.pdf

Reference22 articles.

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2. Ji P, Jin H, Li D, Su X, Wang B (2019) Thermal analysis of inductively coupled atmospheric pressure plasma jet and its effect for optical processing. Optik 185:381–389

3. Dai Z, Xie X, Zhou L, Chen S, Gan Z (2019) Investigation of global thermal effect of large fused silica surface figuring using inductively coupled plasma. Optik 180:254–263

4. Lu Y, Xie X, Zhou L, Dai Z, Chen G (2017) Improve optics fabrication efficiency by using a radio frequency ion beam figuring tool. Appl Opt 56(2):260

5. Xin Q, Su X, Wang B (2016) Modeling study on the surface morphology evolution during removing the optics surface/subsurface damage using atmospheric pressure plasma processing. Appl Surf Sci 382:260–267

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