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Optimization strategy for the velocity distribution based on tool influence function non-linearity in atmospheric pressure plasma processing

  • Published:2020-09 Issue: Volume:65 Page:269-278
  • ISSN:0141-6359
  • Container-title:Precision Engineering
  • language:en
  • Short-container-title:Precision Engineering

Author:

Ji Peng,Li Duo,Su Xing,Qiao Zheng,Wu Kaiji,Song Li,Peng Bing,Wang Bo

Funder

National Natural Science Foundation of China

China Postdoctoral Science Foundation

National Science and Technology Major Project

Publisher

Elsevier BV

Subject

General Engineering

Reference23 articles.

1. Optimization of computer controlled polishing;Jones;Appl Optic,1977

2. Magnetorheological finishing: a deterministic process for optics manufacturing;Jacobs,1995

3. Fluid jet polishing of optical surfaces;Fähnle;Appl Optic,1998

4. Ion beam figuring of small optical components;Drueding;Opt Eng,1995

5. The ‘Precessions’ tooling for polishing and figuring flat, spherical and aspheric surfaces;Walker;Optic Express,2003

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