Combined NRA, channeling-RBS and FTIR ellipsometry analyses for the determination of the interface and bonding state of thin SiOx and SiNxOy layers

Author:

Michelmann R. W.,Baumann H.,Markwitz A.,Meyer J. D.,R�seler A.,Krimmel E. F.,Bethge K.

Publisher

Springer Science and Business Media LLC

Subject

Biochemistry,Analytical Chemistry,Biochemistry

Reference16 articles.

1. Pantelides ST, Lucovsky G (1987) SiO2 and its interfaces. Materials Research Society Symposium Proceedings

2. Reeson KJ, Hemment PLF, Kilner JA, Chater RJ, Meeksion CD, Marsh C, Booker GR, Davis JR (1986) Vacuum 36:891

3. Markwitz A, Bachmann M, Baumann H, Krimmel EF, Misaelides P, Bethge K (1992) Nucl Instr Meth B68:218

4. Battistig G, Amsel G, d'Artemare E (1992) Nucl Instr Meth B66:1

5. Theodossiu W, Baumann H, Markwitz A, Bethge K (1995) Fresenius J Anal Chem (this issue)

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