Magnetically suspended contact-free linear actuator for precision stage

Author:

Lee Sang Heon,Baek Yoon Su

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering

Reference10 articles.

1. Craig, J. J., 1989, Introduction to robotics mechanic and control, Addison-Wesley Publishing Company.

2. Griffiths, D. J., 1989,Introduction to electrodynamics, PRENTICE HALL.

3. Jin, J. and Higuchi, T., 1997, “Direct Electrostatic Levitation and Propulsion,”IEEE Trans. on Industrial Electronics, Vol. 44, No. 2, pp. 234–239.

4. Jung, K. S. and Baek. Y. S., 2001, “Precision Stage Using A Novel Contact-Free Planar Actuator Based on Combination of Electromagnetic forces,”Trans, on KSME A, Vol. 25, No. 11, pp. 1863–1872.

5. Jung, K. S., Lee, S. H. and Baek, Y. S., 2002, “Feasibility Study of General-purpose Precision Stage Using A Novel Contact-Free Surface Actuator Based on Magnetic Suspension Technology, ”Trans. on KSME A, Vol. 26, No. 3, pp. 452–460.

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