Design and Analysis of the Controller for Novel 6-DOF Magnetic Suspension Platform

Author:

Meng Yulu1,Meng Yl M1,Niu Pingjuan1,Niu Pjn1,Cao Shinan2,Sn Cao Cao2,Bai Jie2,Bai J B2

Affiliation:

1. Tiangong University,School of Electronic and Information Engineering,Tianjin,China,300387

2. TianGong University,School of Mechanical Engineering,TianJin,P. R. China,300387

Funder

National Natural Science Foundation of China

Publisher

IEEE

Reference28 articles.

1. Prototype of 6-DOF Magnetically Levitated Stage Based on Single Axis Lorentz force Actuator

2. Development of 3-axis nano stage for precision positioning in lithography system;lee;Proc IEEE International Conference Mechatronics and Automation,2005

3. Development of 3-axis nano stage for precision positioning in lithography system;lee;Proc IEEE International Conference Mechatronics and Automation,2005

4. Magnetically Suspended Contact-Free Linear Actuator for Precision Stage;sang;KSME International Journal,2003

5. In g-LIMIT - A vibration isolation system for the microgravity science glovebox;whorton;37th Aerospace Sciences Meeting and Exhibit 2001,2001

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