Abstract
AbstractThis research work is targeting to demonstrate that micromirror arrays can also be fabricated successfully on flexible substrates—not only on glass substrates. The paper reports on the technological data of a successful process on a flexible substrate for curvilinear surfaces. Polyethylene naphthalate substrate was selected for its low cost, strong resistance against chemicals which are used in fabrication process and sufficient optical transmission for the visible and near infrared spectrum. Finally, electrostatic actuation of the fabricated micromirror structures is proven experimentally.
Funder
European Union Seventh Framework Programme
Bundesministerium für Bildung und Forschung
Universität Kassel
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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