Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)
Author:
Publisher
Springer Science and Business Media LLC
Subject
Analytical Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s00604-006-0556-3.pdf
Reference19 articles.
1. Validation of three-dimensional surface characterising methods: Scanning electron microscopy and confocal laser scanning microscopy
2. Confocal principle for macro- and microscopic surface and defect analysis
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4. Quantitative 3D Reconstruction of Biological Surfaces
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