Author:
Benson Tyrone E.,Kamlet Leonard I.,Klimecky Pete,Terry Fred L.
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Semiconductor Industry Association. The national technology roadmap for semiconductors (1994).
2. S.A. Henck,SPIE Process Module Metrology, Control and Clustering 1594, 213 (1991).
3. J. Stefani and S.W. Butler,J. Electrochem. Soc. 141 (5), 1387 (1994).
4. T.L. Vincent, P.P. Khargonekar, B.A. Rashap, F.L. Terry, Jr. and M.E. Elta,Proc. 1994 American Control Conf. (1994).
5. D. Zahorski, J.L. Mariani, L. Escadafals and J. Gilles,Thin Solid Films 234, 412 (1993).
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