Fabrication of Nanopatterns on Silicon Surface by Combining AFM-Based Scratching and RIE Methods-Reference-Cited by-同舟云学术

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Fabrication of Nanopatterns on Silicon Surface by Combining AFM-Based Scratching and RIE Methods

Published:2018-10-11 Issue:4 Volume:1 Page:225-235
ISSN:2520-811X
Container-title:Nanomanufacturing and Metrology
language:en
Short-container-title:Nanomanuf Metrol

Author:

Geng Yanquan,Yan Yongda^ORCID,Wang Jiqiang,Zhuang Yun

Funder

National Natural Science Foundation of China

Foundation for Innovative Research Groups of the National Natural Science Foundation of China

Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education

China Postdoctoral Science Foundation

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Materials Science (miscellaneous)

Link

http://link.springer.com/article/10.1007/s41871-018-0024-9/fulltext.html

Reference27 articles.

1. Tian W, Wang YD, Chen L (2017) Self-powered nanoscale photodetectors. Small 13:1701848

2. Samit KR, Katiyar AK, Raychaudhuri AK (2017) One-dimensional Si/Ge nanowires and their heterostructures for multifunctional applications—a review. Nanotechnology 28:092001

3. Jenie SNA, Plush SE, Voelcker NHR (2016) Advances on luminescent enhancement-based porous silicon biosensors. Pharm Res 33:2314–2336

4. Lawal AT (2018) Progress in utilisation of graphene for electrochemical biosensors. Biosens Bioelectron 106:149–178

5. Naokatsu I, Nobuyoshi K, Akira K (2013) Nanostructuring of free-standing, dielectric membranes using electron-beam lithography. J Vac Sci Technol B 31(6):06F703

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4. Electric-Field and Mechanical Vibration-Assisted Atomic Force Microscope-Based Nanopatterning;Journal of Micro and Nano-Manufacturing;2022-06-01

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