Command shaping control for micro-milling operations

Author:

Fortgang Joel,Singhose William,de Juanes Márquez Juan,Perez Jesus

Publisher

Springer Science and Business Media LLC

Subject

Computer Science Applications,Control and Systems Engineering

Reference30 articles.

1. J. Fortgang, J. d. J. Marquez, and W. Singhose, “Application of input shaping on micro-mills,” Japan — USA Symposium on Flexible Automation, Denver, Colorado, 2004.

2. T. Kawai, K. Sawada, and Y. Takeuchi, “Ultraprecision micro structuring by means of mechanical machining,” Proc. of International Conference on MEMS, pp. 22–25, 2001.

3. Y. Okazaki, T. Mori, and N. Norita, “Desk-top NC milling machine with 200 krpm spindle,” Proc. of ASPE 2001 Annual Meeting, Crystal City, VA, pp. 192–195, 2001.

4. C. R. Friedrich, P. Coane, J. Goettert, and N. Gopinathin, “Direct fabrication of deep x-ray lithography masks by micromechanical milling,” Precision Engineering, vol. 22, pp. 164–173, 1998.

5. C. R. Friedrich and M. J. Vasile, “Development of the micromilling process for high-aspect-ration microstructures,” J. of Microelectromechanical Systems, vol. 5, no. 1, pp. 33–38, 1996.

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