Chemical mechanical polishing of polymer films-Reference-Cited by-同舟云学术

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Chemical mechanical polishing of polymer films

Published:1998-10 Issue:10 Volume:27 Page:1088-1094
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Towery Dan,Fury Michael A.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-998-0142-z.pdf

Reference16 articles.

1. I. Newton, 1695, Opticks 4th Ed. 1730, (New York: Dover Publications Inc., 1952).

2. M.A. Fury, Solid State Technology 40, 81, (1997).

3. J.F. Archard, J. Appl. Phys. 24, 981 (1953).

4. N. J. Brown, Document MISC4476, Revision 1, (Livermore, CA: Lawrence Livermore National Laboratory, 1990).

5. W.L. Silvernail and B.L. Silvernail, Optical World 9, 7 (1980).

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