Author:
Morisawa Yuji,Kikuma Isao,Takayama Naoki,Takeuchi Manabu
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. CMP processing of high mobility channel materials: alternatives to Si;Advances in Chemical Mechanical Planarization (CMP);2022
2. CMP processing of high mobility channel materials;Advances in Chemical Mechanical Planarization (CMP);2016