Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut-Reference-Cited by-同舟云学术

Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut

Published:1998-09 Issue:9 Volume:27 Page:1059-1066
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Lu Xiang,Iyer S. Sundar Kumar,Lee Jin,Doyle Brian,Fan Zhineng,Chu Paul K.,Hu Chenming,Cheung Nathan W.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-998-0164-6.pdf

Reference34 articles.

1. N.W. Cheung, W. En, J. Gao, S.S.K. Iyer, E.C. Jones, B.P. Linder, J.B. Liu, X. Lu, J. Min and B. Shieh, 1995 Intl. Conf. on Solid State Dev. and Mat. Ext. Abs., (Osaka, Japan, 1995), p. 351.

2. E.C. Jones, B.P. Linder and N.W. Cheung, Jpn. J. Appl. Phys. 35, Part 1, (2B), 1027 (1996).

3. P.K. Chu, S. Qin, C. Chan, N.W. Cheung and L.A. Larson, Mater. Sci. and Eng. R17 (6–7), 207 (1996).

4. E.C. Jones, S. Im and N.W. Cheung, Beam-Solid Interactions: Fundamentals and Applications, 279, ed. M. Nastasi, (Pittsburgh, PA: Mater. Research Society, 1993), p. 255.

5. E.C. Jones and N.W. Cheung, IEEE Elec. Dev. Lett. 14 (9), 444, (1993).

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Biomaterials Using Plasma Immersion Ion Implantation and Deposition Surface Modification of;Biomaterials Fabrication and Processing Handbook;2008-03-27

2. Fabrication and characteristics of novel microelectronic structures fabricated by plasma-based techniques;Surface and Coatings Technology;2007-04

3. Strain and electrical characterization of metal-oxide-semiconductor field-effect transistor fabricated on mechanically and thermally transferred silicon on insulator films;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004

4. Recent developments and applications of plasma immersion ion implantation;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004

5. Semiconductor applications of plasma immersion ion implantation;Plasma Physics and Controlled Fusion;2003-03-26