AC actuation contribution to the induced electromotive force in the miniaturized inductive planar microphone-Reference-Cited by-同舟云学术

AC actuation contribution to the induced electromotive force in the miniaturized inductive planar microphone

Published:2016-11-14 Issue:3 Volume:90 Page:551-562
ISSN:0925-1030
Container-title:Analog Integrated Circuits and Signal Processing
language:en
Short-container-title:Analog Integr Circ Sig Process

Author:

Tounsi Farès,Said Mohamed Hadj,Kouki Ammar B.,Mezghani Brahim

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing

Link

http://link.springer.com/content/pdf/10.1007/s10470-016-0876-0.pdf

Reference24 articles.

1. Varadan, V. K., Vinoy, K. J., & Gopalakrishnan, S. (2006). Smart material systems and MEMS: Design and development methodologies. New York: Wiley.

2. Madou, M. (1997). Fundamentals of microfabrication. Boca Raton: CRC Press.

3. Hohm, D., & Gerhard-Multhaupt, R. (1984). Silicon-dioxide electret transducers. Journal of the Acoustical Society of America, 75, 1297–1298.

4. Ma, T., & Man, T. Y. (2002). Design and fabrication of an integrated programmable floating gate microphone. In Proceedings of the 15th IEEE international conference on micro electro mechanical systems (pp. 288–291).

5. Miao, J., Lin, R., Chen, L., Zou, Q., Lim, S. Y., & Seah, S. H. (2002). Design consideration in micromachined silicon microphones. Microelectronics Journal, 33, 21–28.

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Performances Evaluation of On-Chip Large-Size-Tapped Transformer for MEMS Applications;IEEE Transactions on Instrumentation and Measurement;2020-09