Frequency and displacement analysis of electrostatic cantilever-based MEMS sensor-Reference-Cited by-同舟云学术

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Frequency and displacement analysis of electrostatic cantilever-based MEMS sensor

Published:2016-01-25 Issue:1 Volume:88 Page:1-11
ISSN:0925-1030
Container-title:Analog Integrated Circuits and Signal Processing
language:en
Short-container-title:Analog Integr Circ Sig Process

Author:

Shoaib Muhammad,Hisham Nor,Basheer Noohul,Tariq Mohammad

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing

Link

http://link.springer.com/content/pdf/10.1007/s10470-016-0695-3.pdf

Reference27 articles.

1. Lim, J. H., Ratnam, M. M., Azid, I. A., & Mutharasu, D. (2010). Deflection measurement and determination of Young’s modulus of micro-cantilever using phase-shift Shadow Moiré method. Experimental Mechanics, 50(7), 1051–1060. doi: 10.1007/s11340-009-9307-9 .

2. Beaulieu, L. Y., Godin, M., Laroche, O., Tabard-Cossa, V., & Grütter, P. (2007). A complete analysis of the laser beam deflection systems used in cantilever-based systems. Ultramicroscopy, 107(4–5), 422–430. doi: 10.1016/j.ultramic.2006.11.001 .

3. Zhang, J., & Fu, Y. (2012). Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory. Meccanica, 47(7), 1649–1658. doi: 10.1007/s11012-012-9545-2 .

4. Rajabi, F., & Ramezani, S. (2013). A nonlinear microbeam model based on strain gradient elasticity theory. Acta Mechanica Solida Sinica, 26(1), 21–34. doi: 10.1016/S0894-9166(13)60003-8 .

5. Mirza, A., Hamid, N. H., Khir, M. H. M., Dennis, J. O., Ashraf, K., Shoaib, M., et al. (2014). A CMOS-MEMS cantilever sensor for capnometric applications. IEICE Electronics Express, 11(9), 6. doi: 10.1587/elex.11.20140113 .

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