Author:
Park Jin Su,Kim Tae Hee,Choi Chang Sun,Hahn Yoon-Bong
Publisher
Springer Science and Business Media LLC
Subject
General Chemical Engineering,General Chemistry
Reference14 articles.
1. Bu, S. D., Park, B. H., Kang, B. S., Kang, S. H. and Noh, T. W., “Pulsed Laser Ablation Synthesis and Characterization of Ferroelectric SrBi2Ta2O9”,J. Korean Phys. Soc.,35, S1197 (1999).
2. Desu, S. B. and Pan, W., “Reactive Ion Etching of Ferroelectric SrBi2 TaxNb2-xO9 Thin Films”,Appl. Phys. Lett.,68, 566 (1996).
3. Hahn, Y. B., Hays, D. C., Donovan, S. M., Abernathy, C. R., Han, J., Shul, R. J., Cho, H., Jung, K. B. and Pearton, S. I, “Effect of Additive Noble Gases in Chlorine-Based Inductively Coupled Plasma Etching of GaN, InN and AlN”,J. Vac. Sci. Technol. A,17(3), 763 (1999).
4. Hahn, Y. B. and Pearton, S. J., “Global Self-Consistent Model of an Inductively Coupled Plasma Etching System”,Korean J. Chem. Eng.,17, 304 (2000).
5. Hahn, Y. B., Hays, D. C., Cho, H., Jung, K. B., Abernathy, C. R., Donovan, S. M., Pearton, S. J., Han, J. and Shul, R. J.,Mat. Sci. Eng. B,60, 95 (1999).
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