Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s11595-009-5702-4.pdf
Reference18 articles.
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3. Veprek S, Reiprich S, Li S Z. Superhard Nanocrystalline Composite Materials: the TiN/Si3N4 System[J]. Appl. Phys. Lett., 1995, 66: 2640–2642
4. Diserens M, Patscheider J, Levy F. Improving the Properties of Titanium Nitride by Incorporation of Silicon[J]. Surf. Coat. Technol., 1998, 108–109: 241–246
5. Zhang C H, Lu X C, Wang H, et al. Microstructure, Mechanical Properties, and Oxidation Resistance of Nanocomposite Ti-Si-N Coatings[J]. Appl. Surf. Sci., 2006, 252: 6141–6153
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Influence of Si Content on Properties of Ti(1-x)SixN Coatings;Journal of Wuhan University of Technology-Mater. Sci. Ed.;2019-08
2. Friction and wear performances of cathodic arc ion plated TiAlSiN coating under oil lubricated condition;Journal of Wuhan University of Technology-Mater. Sci. Ed.;2017-12
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