Author:
Criegern R. v.,Hillmer T.,Huber V.,Oppolzer H.,Weitzel I.
Publisher
Springer Science and Business Media LLC
Subject
Biochemistry,Analytical Chemistry,Clinical Biochemistry,General Materials Science,General Medicine,Analytical Chemistry
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4. Pawlik D, Oppolzer H, Hillmer T (1984) Characterization of thermal oxides grown on TaSi2/polysilicon films. Zur Veröffentlichung eingereicht an J Vac Science & Technol B
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