Author:
Ivashchenko V. I.,Porada O. K.,Ivashchenko L. A.,Timofeeva I. I.,Sinel’nichenko O. K.,Butenko O. O.,Ushakov M. V.,Ushakova L. A.
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics,Ceramics and Composites
Reference23 articles.
1. A. Bendeddouche, R. Berjoan, E. Beche, et al., “Structural characterization of amorphous SiC x N y chemical vapor deposited coating,” J. Appl. Phys., 81, 6147−6154 (1997).
2. A. Bendeddouche, R. Berjoan, E. Beche, and R. Hillel, “Hardness and stiffness of amorphous SiC x N y chemical vapor deposited,” Surf. Coat. Technol., 111, 184−190 (1999).
3. I. Ferreira, E. Fortunato, P. Vilarinho, et al., “Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques,” J. Non-Cryst. Sol., 352, 1361−1366 (2006).
4. N. J. Wagner, J. Cordill, L. Zajickova, et al., “Thermal plasma chemical vapor deposition of superhard nanostructured Si―C―N coatings,” Mater. Res. Soc. Symp. Proc., 880E, BB2.10.1/O3.10.1−5 (2005).
5. P. Jedrzejowski, J. Cizek, A. Amassian, et al., “Mechanical and optical properties of hard SiCN coatings prepared by PECVD,” Thin Sol. Films, 447–448, 201−207 (2004).
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