1. Preston FW (1927) The theory and design of plate glass polishing machines. Journal of Glass Technology 11(44):214–256
2. Suzuki N, Hashimoto Y, Yasuda H, Yamaki S, Mochizuki Y (2017) Prediction of polishing pressure distribution in CMP process with airbag type wafer carrier. CIRP Ann 66(1):329–332
3. Ren L, Zhang F, Liao D, Zhao S, Xie R (2018) Theoretical model and experimental analysis of non-uniform material removal during full-aperture polishing. Int J Adv Manuf Technol 101(1–4):137–146
4. Wang Q, Wang Z, Chen S, Yu H, Peng Y (2017) Investigation on removal features of fixed abrasive diamond pellets based on elasticity tool. Int J Adv Manuf Technol 91(1–4):1–8
5. Guo J, Suzuki H, Morita SY, Yamagata Y, Higuchi T (2013) A real-time polishing force control system for ultraprecision finishing of micro-optics. Precis Eng 37(4):787–792