Characterization analysis of 532 nm laser drilling of silicon-based glass heterogeneous integration composites
Author:
Funder
National Science and Technology Council, Taiwan
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00170-022-10425-7.pdf
Reference19 articles.
1. Daniel GO, Pilar HF, Peres Henrique EM, Josue MG, Koiti A, Sergi GS, Gino P (2021) Silver enhances hematite nanoparticles based ethanol sensors and selectivity at room temperature. Sensors 21(2):440. https://doi.org/10.3390/s21020440
2. Xu JM, Cheng JP (2016) The advances of Co3O4 as gas sensing materials: a review. J Alloys and Compounds 686:753–768. https://doi.org/10.1016/j.jallcom.2016.06.086
3. Lin CS, Hsieh HF, Ding CF, Li KM, Young HT, Hsiao WT (2022) Laser surface modification on rGO/ZnO composite materials for NO2 gas sensing. J Mater Chem Phys 290:126551. https://doi.org/10.1016/j.matchemphys.2022.126551
4. Theuss H, Pressel K (2020) Handbook of Silicon Based MEMS Materials and Technologies (Third Edition), Oxford, UK, pp. 691–706
5. Fischer AC, Forsberg F, Lapisa M, Bleiker SJ, Stemme G, Roxhed N, Niklaus F (2015) Integrating MEMS and ICs. Microsyst Nanoeng 1(1):15005. https://doi.org/10.1038/micronano.2015.5
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3