Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Reference12 articles.
1. Pan C-T, Yang H, Wang H-J, Chou M-C (1999) Behavior of the developing process for ultra-deep microstructures. Sens Mater 11(6):339–347
2. Yang H, Kang S-W (2000) Improvement of thickness uniformity in nickel electroforming for the LIGA process. Int J Mach Tools Manuf 40:1065–1072
3. Yang H, Pan C-T, Chou M-C (2001) Ultra-fine machining tool/molds by LIGA technology. J Micromech Microeng 11(2):94–99
4. van Kan JA, Sanchez IL, Xu B, Osipowicz T, Watt F (1999) Micromachining using focused high energy ion beams: deep ion beam lithography. Nucl Instrum Meth Phys Res B 148:1085–1089
5. Bhattacharyya B, Doloi B, Sridhar PS (2001) Electrochemical micro-machining: new possibilities for micro-manufacturing. J Mater Process Technol 113:301–305
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献