A Low Cost Angular Rate Sensor for Automotive Applications in Surface Micromachining Technology-Reference-Cited by-同舟云学术

A Low Cost Angular Rate Sensor for Automotive Applications in Surface Micromachining Technology

Published:1999 Issue: Volume: Page:239-250
ISSN:
Container-title:Advanced Microsystems for Automotive Applications 99
language:
Short-container-title:

Author:

Schellin R.,Thomae A.,Lang M.,Bauer W.,Mohaupt J.,Bischopink G.,Tanten L.,Baumann H.,Emmerich H.,Pintér S.,Marek J.,Funk K.,Lorenz G.,Neul R.

Publisher

Springer Berlin Heidelberg

Link

http://link.springer.com/content/pdf/10.1007/978-3-662-03838-3_20

Reference9 articles.

1. J. Marek. Silicon microsystems for automotive applications, Robert Bosch GmbH, 1997.

2. C. Song, M. Shinn, Commercial vision of silicon-based inertial sensors, Sensors and Actuators A66(1998), pp. 231-236

3. J.-J. Choi, R. Risaku, K. Minami, M. Esashi, Silicon Angular Resonance Gyroscope by Deep ICPRIE and XeF2 Gas Etching, IEEE Proceedings of MEMS98, Heidelberg, pp.322-327

4. WA. Clark, R.T. Howe and R. Horowitz, Surface Micromachined Z-Axis Vibratory Gyroscope, IEEE

5. B. Folkmer, J. Merz, H. Sandmaier, W. Lang, A New Silicon Rate Gyroscope, W. Geiger, IEEE Proceedings of MEMS98, Heidelberg, pp. 615-620

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