Publisher
Springer Berlin Heidelberg
Reference5 articles.
1. H. Saeki, J. Ideda, I. Kohzu, and H. Ishimaru: J. Vac. Sci. Technol. A 7, 2512 (1989).
2. Y. Minamigawa, Y. Maeda, and H. Yamakawa: J. Vac. Sci. Technol. A 7, 2508 (1989).
3. G. S. Selwyn, J. E. Heilenreich, and K. L. Haller: J. Vac. Sci. Technol. A 9, 2817 (1991).
4. G. S. Selwyn: Proc. 2nd Int. Symp. Semiconductor Manufacturing, Austin, 405423 (9/1993).
5. M. Edamura and N. Tsumaki: Proc. 5th Int. Symp. Semiconductor Manufacturing, Tokyo, 196–199 (10/1996).
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