An Overview of Reliability and Failure Mode Analysis of Microelectromechanical Systems (MEMS)-Reference-Cited by-同舟云学术

An Overview of Reliability and Failure Mode Analysis of Microelectromechanical Systems (MEMS)

Published: Issue: Volume: Page:953-966
ISSN:
Container-title:Handbook of Performability Engineering
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Author:

Li Yuanbo,Jiang Zhibin

Publisher

Springer London

Link

http://link.springer.com/content/pdf/10.1007/978-1-84800-131-2_58.pdf

Reference109 articles.

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5. Kim BH, Chung TD, Oh CH. A new organic modifier for anti-stiction. Journal of Microelectromechanical Systems 2001;10(1):33–40.

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