AZARASHI (Seal) Mechanism for Meso/Micro/Nano Manipulators
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Publisher
Springer London
Link
http://link.springer.com/content/pdf/10.1007/978-1-84882-991-6_3.pdf
Reference10 articles.
1. May Jr WG (1975) Piezoelectric Electromechanical Translation Apparatus. US Pat 3902084
2. Sugihara K, Mori I, Tojo T et al (1989) Piezoelectrically Driven XY Table for Submicron Lithography Systems. Rev Sci Instrum 60: 3024-3029
3. Higuchi T, Watanabe M, Kudoh K (1988) Precise positioner Utilizing Rapid Deformations of Piezoelectric Elements. J Jpn Soc Precis Eng 54: 2107-2112 [in Japanese]
4. Shim JY, Gweon DG (2001) Piezo-driven metrological multiaxis nanopositioner. Rev Sci Instrum 72: 4183-4187
5. Furutani K, Ohta N, Kawagoe K (2003) Coarse and Fine Positioning Performance of an L-shaped Seal Mechanism with Three Degrees of Freedom. Meas Sci Technol 15: 103-111
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1. Expectations about New Actuators;TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C;2011
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