Piezo-driven metrological multiaxis nanopositioner
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1408932
Reference9 articles.
1. Dynamic piezoelectric translation devices
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3. Variable‐temperature scanning tunneling microscope
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5. Vertical two‐dimensional piezoelectric inertial slider for scanning tunneling microscope
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