Preparation of Ag2O modified silica abrasives and their chemical mechanical polishing performances on sapphire
Author:
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Mechanical Engineering
Link
http://link.springer.com/article/10.1007/s40544-017-0156-8/fulltext.html
Reference25 articles.
1. Gentilman R L, Maguire E A, Starrett H S, Hartnett T M, Kirchner H P. Strength and transmittance of sapphire and strengthened sapphire. J Am Ceram Soc 64(9): C–116–C–127 (1981)
2. Li J, Nutt S R, Kirby K W. surface modification of sapphire by magnesium-ion implantation. J Am Ceram Soc 82(11): 3260–3262 (1999)
3. Niu X, Liu Y. Method of surface treatment on sapphire substrate. Trans Nonferrous Met Soc China 16: s732–s734 (2006)
4. Park H, Chan H M. A novel process for the generation of pristine sapphire surfaces. Thin Solid Films 422(1): 135–140 (2002)
5. Nakamura S. InGaN-based laser diodes. Annual Review of Materials Research 28(1): 125–152 (2003)
Cited by 29 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Advanced polishing methods for atomic-scale surfaces: A review;Materials Today Sustainability;2024-09
2. Lapping of sapphire using developed clusters of diamond and ceria chemically active abrasives;Materials Today Communications;2024-06
3. Study on Mechanical Properties of Rice Husk Fiber-Based Polishing Pad for Chemical Mechanical Polishing of Sapphire Substrate;2024 1st International Conference on Robotics, Engineering, Science, and Technology (RESTCON);2024-02-16
4. Performance on lapping quartz glass by UV curing fixed abrasive pad with Gr2O3-diamond composite abrasives;Materials Science in Semiconductor Processing;2024-01
5. The Exploration of Lapping Sapphire with Diamond-Ceo2 Chemically Active Abrasives Cluster;2024
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3