Author:
Rusakov Alexander,Bystrov Peter,Knizhnik Andrey,Potapkin Boris
Reference15 articles.
1. H. F. Winters and J. W. Coburn, Appl. Phys. Lett. 34, 70 (1979).
2. L. R. Arana, N. de Mas, R. Schmidt, A. J. Franz, M. A. Schmidt and K. F. Jensen, J. Micromech. Microeng 17, 384 (2007).
3. B. E. Volland, Ph. D. Thesis, University of Kassel, 2004.
4. V. K. Singh, E. S. G. Shaqfeh, and J. P. McVittie, J. Vac. Sci. Technol. B 10, 1091 (1992).
5. I. V. Katardjiev, J. Vac. Sci.Technol. A 7, 3222 (1989).
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