The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches

Author:

Papaioannou George

Publisher

Springer Netherlands

Reference54 articles.

1. Rebeiz, G. M., “RF MEMS,” in Theory, Design and Technology. Hoboken, NJ: Wiley, 2003, pp. 185–192

2. J. Wibbeler, G. Pfeifer and M. Hietschold, Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS), Sensors and Actuators A 71, 74–80 (1998)

3. X. Yuan, S. Cherepko, J. Hwang, C. L. Goldsmith, C. Nordquist and C. Dyck, Initial Observation and Analysis of Dielectric-Charging Effects on RF MEMS Capacitive Switches, International Microwave Symposium, pp. 1943–1946, 2004

4. S. Melle, F. Flourens, D. Dubuc, K. Grenier, P. Pons, F. Pressecq, J. Kuchenbecker, J. L. Muraro, L. Bary, and R. Plana, in Proc. 33rd Eur. Microwave.Conf., Oct. 2003, pp. 37–40.

5. P. Czarnecki; X. Rottenberg; R. Puers; I. de Wolf, “Effect of Gas Pressure on the Lifetime of Capacitive RF MEMS Switches”, 19th IEEE Interna Microtional Conference on Electro Mechanical Systems, 2006. MEMS 2006 Istanbul, p. 890–893

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