Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents-Reference-Cited by-同舟云学术

Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents

Published:2010 Issue: Volume: Page:261-274
ISSN:1874-6500
Container-title:NATO Science for Peace and Security Series B: Physics and Biophysics
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Author:

Stolyarova Sara,Shemesh Ariel,Aharon Oren,Cohen Omer,Gal Lior,Eichen Yoav,Nemirovsky Yael

Publisher

Springer Netherlands

Link

http://link.springer.com/content/pdf/10.1007/978-90-481-3807-4_21.pdf

Reference28 articles.

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3. “Properties of Silicon”, INSPEC, London, 1988 (ISBN 0 85296 475 7).

4. S. Stolyarova S. Cherian R. Raiteri, J. Zeravik, P. Skladal and Y. Nemirovsky, “Composite Porous Silicon-Crystalline Silicon Cantilevers for Enhanced Biosensing”, Sen. Actuators B 131, 509 (2008).

5. C. Gemme, A. M. Fiorello, G. Gagliardi, M. Gilchriese, P. Netchaeva, L. Rossi, E. Ruscino, F. Vernocchi, M. Varasi, “Study of indium bumps for the ATLAS pixel detector”, Nuclear Instruments and Methods in Physics Research A 465, 200 (2001).

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