Laser-reactive ablation deposition of silicon-nitride films-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Laser-reactive ablation deposition of silicon-nitride films

Published:1995-03 Issue:3 Volume:60 Page:275-283
ISSN:0947-8396
Container-title:Applied Physics A Materials Science & Processing
language:en
Short-container-title:Appl. Phys. A

Author:

Giorgi M. L.,Leggieri G.,Luches A.,Martino M.,Perrone A.,Majni G.,Mengucci P.,Zemek J.,Mihailescu I. N.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF01538403.pdf

Reference21 articles.

1. Springer Ser. Mater. Sci.;I.W. Boyd,1987

2. E. D'Anna, G. Leggieri, A. Luches: Thin Solid Films218, 219 (1992).

3. J. Narayan, P. Tiwari, X. Chen, J. Singh R. Chowdhurty, T. Zheleva: Appl. Phys. Lett.61, 1290 (1992).

4. E. Fogarassy, A. Slaoui, C. Fuchs, J.P. Stoquert: Appl. Surf. Sci.46, 195 (1990).

5. F. Vega, C.N. Afonso, C. Ortega, J. Siejka: J. Appl. Phys.,74, 963 (1993).

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Formation of core-shell structured silicon nanoparticles during pulsed laser ablation;Journal of Applied Physics;2010-05

2. Laser ablation of silicon in neon gas: Study of excitation mechanism of neon neutrals by ablated silicon ions;Journal of Applied Physics;2005-08-15

3. Pulsed laser ablation of silicon with low laser fluence in a low-pressure of ammonia ambient;Applied Surface Science;2004-04

4. Preparation of SiNx film by pulsed laser ablation in nitrogen gas ambient;Applied Surface Science;2002-09

5. RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation;Applied Surface Science;1998-05

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3