Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering
Link
http://link.springer.com/article/10.1007/s11465-017-0447-9/fulltext.html
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5. Welham C J, Greenwood J, Bertioli M M. A high accuracy resonant pressure sensor by fusion bonding and trench etching. Sensors and Actuators A: Physical, 1999, 76(1–3): 298–304
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