Growth and properties of hydrogenated microcrystalline silicon thin films prepared by magnetron sputtering with different substrate temperatures
Author:
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Metals and Alloys,Physical and Theoretical Chemistry,Condensed Matter Physics
Link
https://link.springer.com/content/pdf/10.1007/s12598-015-0510-9.pdf
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4. Klein S, Finger F, Carius R, Dylla T, Rech B, Grimm M, Houben L, Stutzmann M. Intrinsic microcrystalline silicon prepared by hot-wire chemical vapour deposition for thin film solar cells. Thin Solid Films. 2003;430(1–2):202.
5. Luo PQ, Zhou ZB, Chan KY, Tang DY, Cui RQ, Dou XM. Gas doping ratio effects on p-type hydrogenated nanocrystalline silicon thin films grown by hot-wire chemical vapor deposition. Appl Surf Sci. 2008;255(5):2910.
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