Author:
Yang Heng,Xu Kefeng,Yang Yongliang,Li Tie,Jiao Jiwei,Li Xinxin,Wang Yuelin
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Alan T, Hines MA, Zehnder AT (2006) Effect of surface morphology on the fracture strength of silicon nanobeams. Appl Phys Lett 89:091901
2. Bao MH (2000) Micro mechanical transducers-pressure sensors, accelerometers, and gyroscopes. Elsevier, Amsterdam
3. Cleland AN, Roukes ML (1996) Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals. Appl Phys Lett 69:2653–3655
4. Cristea C, Kusko M, Tibeica C, Muller R, Manea E, Syvridis (2005) Design and experiments for tunable optical sensor fabrication using (111)-oriented silicon micromachining. Sens Actuators A113:312–318
5. Ekinci KL, Roukes ML (2005) Nanoelectromechanical systems. Rev Sci Instrum 76:061101
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献