Funder
National Natural Science Foundation of China
Natural Science Foundation of Shaanxi Province
State Key Laboratory for Manufacturing Systems Engineering
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Bao Z, Hara M, Kuwano H (2015) Highly sensitive strain sensors using surface acoustic wave on aluminum nitride thin film for wireless sensor networks. In: 2015 Transducers—2015 18th international conference on solid-state sensors, actuators and microsystems (TRANSDUCERS), Anchorage, pp 1239–1242
2. Belknap E (2011) Mechanical characterization of SAW-based sensors for wireless high temperature strain measurements, Dissertation. Ohio State University, Ohio
3. Drafts B (2001) Acoustic wave technology sensors. IEEE Trans Microw Theory Tech 49(4):795–802
4. Du X (2012) Design and fabrication of a prototype aluminum nitride-based pressure sensor with finite element analysis and validation, Dissertation. Wayne State University, Detroit
5. Elsherbini MM, Elkordy MF, Gomaa AM (2015) Analytical modeling and simulation of SAW filter using concave. Telkomnika Indones J Electr Eng 16(3):495–501
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献