Direct LIGA service for prototyping: status report

Author:

Loechel B.,Goettert J.,Desta Y. M.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Hruby J (ed) Proceedings HARMST 2003, Monterey, June 2003; copies of the proceedings can be requested from the editor (jhruby@SANDIA.gov) or the author of this paper (Jost Goettert, jost@LSU.edu)

2. Jian L, Desta YM, Aigeldinger G, Bednarzik M, Loechel B, Goettert J (2003) SU-8 based deep X-ray lithography/LIGA, Proc SPIE 4979:394–401

3. Kwon TH (ed) Proceedings HARMST 2005, Gyeongju, June 2005; copies of the proceedings can be requested from the editor (thkwon@postech.ac.kr)

4. Oh HS et al (2005) In: Proceedings HARMST 2005, Gyeongju, June pp 72–73

5. Turner R, Desta Y, Kelly K, Zhang J, Geiger E, Cortez S, Mancini D (2003) Tapered LIGA HARMs J Micromech Microeng 13:367–372

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