SU-8 based deep x-ray lithography/LIGA-Reference-Cited by-同舟云学术

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SU-8 based deep x-ray lithography/LIGA

Published:2003-01-25 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Jian Linke,Desta Yohannes M.,Goettert Jost,Bednarzik Martin,Loechel Bernd,Jin Yoonyoung,Aigeldinger Georg,Singh Varshni,Ahrens Gisela,Gruetzner Gabi,Ruhmann Ralf,Degen Reinhard

Publisher

SPIE

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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