Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes-Reference-Cited by-同舟云学术

Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

Published:2009-12-23 Issue:8-9 Volume:16 Page:1633-1641
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Ezoe Yuichiro,Mitsuishi Ikuyuki,Takagi Utako,Koshiishi Masaki,Mitsuda Kazuhisa,Yamasaki Noriko Y.,Ohashi Takaya,Kato Fumiki,Sugiyama Susumu,Riveros Raul E.,Yamaguchi Hitomi,Fujihira Shinya,Kanamori Yoshiaki,Morishita Kohei,Nakajima Kazuo,Maeda Ryutaro

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-009-0981-4.pdf

Reference16 articles.

1. Bavdaz M et al (2004) Status of X-ray optics development for the XEUS mission. Proc SPIE 5488:829–836

2. Chang C et al (2005) Etching submicrometer trenches by using the Bosch process and its application to the fabrication of an-tireflection structures. J Micromech Microeng 15:580–585

3. Ezoe Y et al (2006a) Micro pore X-ray optics using anisotropic wet etching of (110) silicon wafers. Appl Opt 45:8932–8938

4. Ezoe Y et al (2006b) MEMS open the way to ultra-lightweight and low-cost X-ray optics SPIE Newsroom. http://spie.org/x8595.xml

5. Ezoe Y et al (2008a) Micromachined X-ray collector for space astronomy. Sens Actuators A 145–146:201–206

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