Author:
Khatami Faraz,Rezazadeh Ghader
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Ananthasuresh GK, Gupta RK, Senturia SD (1996) An approach to macromodeling of MEMS for nonlinear dynamic simulation. In: Proceedings of ASME international conference of mechanical engineering congress and exposition (MEMS), vol 40. Atlanta, GA, pp 1–7
2. Brown TG (2003) Harsh military environments and microelectromechanical (MEMS) devices. Proc IEEE Sens 2(7):53–60
3. Coster JD, Tilmans HCM, van Beek JT, Rijks TGSM, Puers R (2004) The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches. J Micromech Microeng 14(S):49–54
4. Dickensheets DL, Kino GS (1998) Silicon-micromachined scanning confocal optical microscope. J Microelectromech Syst 7:38–47. doi: 10.1109/84.661382
5. Guo JG, Zhao Ya-Pu (2004) Influence of van der Waals and Casimir forces on electrostatic torsional actuators. J Microelectromech Syst 13(6):1027–1035. doi: 10.1109/JMEMS.2004.838390
Cited by
34 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献