Microcantilever-based weather station for temperature, humidity and flow rate measurement-Reference-Cited by-同舟云学术

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Microcantilever-based weather station for temperature, humidity and flow rate measurement

Published:2007-11-17 Issue:7 Volume:14 Page:971-977
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Ma Rong-Hua,Lee Chia-Yen,Wang Yu-Hsiang,Chen Hao-Jen

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-007-0458-2.pdf

Reference10 articles.

1. Bakker A (2002) CMOS smart temperature sensor—an overview. Proc IEEE Sens 2002:1423–1427

2. Chatzandroulis S, Tserepi A, Goustouridis D, Normand P, Tsoukalas D (2002) Fabrication of single Si cantilevers using a dry release process and application in a capacitive-type humidity sensor. Microelectron Eng 61–62:955–961

3. Gogoi BP, Mastrangelo CH (1996) A low voltage force-balanced barometric pressure sensor. IEDM 1996:529–532

4. Lee CY, Lee GB (2003) Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation. J Micremechan Microeng 13:620–627

5. Lee CY, Lee GB (2005) Humidity sensors: a review. Sens Lett 3(1):1–14

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